BibTeX record journals/ieiceee/MuramatsuASTTOY15

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@article{DBLP:journals/ieiceee/MuramatsuASTTOY15,
  author       = {Kyosuke Muramatsu and
                  Hideaki Asakura and
                  Keijiro Suzuki and
                  Ken Tanizawa and
                  Munehiro Toyama and
                  Minoru Ohtsuka and
                  Nobuyuki Yokoyama and
                  Kazuyuki Matsumaro and
                  Miyoshi Seki and
                  Keiji Koshino and
                  Kazuhiro Ikeda and
                  Shu Namiki and
                  Hitoshi Kawashima and
                  Hiroyuki Tsuda},
  title        = {Evaluation of the phase error in Si-wire arrayed-waveguide gratings
                  fabricated by ArF-immersion photolithography},
  journal      = {{IEICE} Electron. Express},
  volume       = {12},
  number       = {7},
  pages        = {20150019},
  year         = {2015},
  url          = {https://doi.org/10.1587/elex.12.20150019},
  doi          = {10.1587/ELEX.12.20150019},
  timestamp    = {Fri, 12 Feb 2021 22:21:18 +0100},
  biburl       = {https://dblp.org/rec/journals/ieiceee/MuramatsuASTTOY15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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