BibTeX record journals/ibmrd/TsujiTI98

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@article{DBLP:journals/ibmrd/TsujiTI98,
  author       = {Satoshi Tsuji and
                  Katsuhiro Tsujimoto and
                  Hideo Iwama},
  title        = {Application of cross-sectional transmission electron microscopy to
                  thin-film-transistor failure analysis},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {42},
  number       = {3},
  pages        = {509--516},
  year         = {1998},
  url          = {https://doi.org/10.1147/rd.423.0509},
  doi          = {10.1147/RD.423.0509},
  timestamp    = {Fri, 13 Mar 2020 10:54:41 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/TsujiTI98.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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