BibTeX record conf/vlsi/TsuchiyaTHST11

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@inproceedings{DBLP:conf/vlsi/TsuchiyaTHST11,
  author       = {Toshiyuki Tsuchiya and
                  Hiroyuki Tokusaki and
                  Yoshikazu Hirai and
                  Koji Sugano and
                  Osamu Tabata},
  title        = {Self-dependent equivalent circuit modeling of electrostatic comb transducers
                  for integrated {MEMS}},
  booktitle    = {{IEEE/IFIP} 19th International Conference on {VLSI} and System-on-Chip,
                  VLSI-SoC 2011, Kowloon, Hong Kong, China, October 3-5, 2011},
  pages        = {208--213},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/VLSISoC.2011.6081639},
  doi          = {10.1109/VLSISOC.2011.6081639},
  timestamp    = {Sat, 19 Oct 2019 20:28:07 +0200},
  biburl       = {https://dblp.org/rec/conf/vlsi/TsuchiyaTHST11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}