BibTeX record conf/nems/YangLWZHSHC13

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@inproceedings{DBLP:conf/nems/YangLWZHSHC13,
  author       = {Liang Yang and
                  Jiawen Li and
                  Jinli Wang and
                  Chenchu Zhang and
                  Yanlei Hu and
                  Yahui Su and
                  Wenhao Huang and
                  Jiaru Chu},
  title        = {Three dimensional micro-mechanical and micro-optical devices fabricated
                  by holographic two-photon lithography},
  booktitle    = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages        = {641--644},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/NEMS.2013.6559811},
  doi          = {10.1109/NEMS.2013.6559811},
  timestamp    = {Thu, 31 Aug 2023 16:47:17 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/YangLWZHSHC13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}