BibTeX record conf/nems/XieJWCC13

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@inproceedings{DBLP:conf/nems/XieJWCC13,
  author       = {Bo Xie and
                  Hailong Jiao and
                  Junbo Wang and
                  Deyong Chen and
                  Jian Chen},
  title        = {An electrostatically-driven and capacitively-sensed differential lateral
                  resonant pressure microsensor},
  booktitle    = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages        = {1271--1274},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/NEMS.2013.6559949},
  doi          = {10.1109/NEMS.2013.6559949},
  timestamp    = {Mon, 23 Oct 2023 15:28:12 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/XieJWCC13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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