BibTeX record conf/nems/WenZYCW11

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@inproceedings{DBLP:conf/nems/WenZYCW11,
  author       = {Li Wen and
                  Hongjiang Zeng and
                  Zheng Yuan and
                  Jiaru Chu and
                  Hai Wang},
  title        = {Simulation and experiments of intrinsic bending of multilayer microcantilever
                  for maskless scanning plasma etching},
  booktitle    = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages        = {634--637},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/NEMS.2011.6017435},
  doi          = {10.1109/NEMS.2011.6017435},
  timestamp    = {Wed, 18 Jan 2023 10:21:15 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/WenZYCW11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}