BibTeX record conf/nems/SuzukiIN11

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@inproceedings{DBLP:conf/nems/SuzukiIN11,
  author       = {Kenta Suzuki and
                  Kumiko Ioka and
                  Yasushiro Nishioka},
  title        = {Fabrication of ring-shaped silicon resonator using (2, 1) in-plane
                  resonance mode},
  booktitle    = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages        = {170--173},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/NEMS.2011.6017322},
  doi          = {10.1109/NEMS.2011.6017322},
  timestamp    = {Fri, 07 Aug 2020 17:48:45 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/SuzukiIN11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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