BibTeX record conf/nems/MiaoJLZZSG09

• > Home > conf/nems/MiaoJLZZSG09

@inproceedings{DBLP:conf/nems/MiaoJLZZSG09,
  author       = {Min Miao and
                  Yufeng Jin and
                  Hongguang Liao and
                  Liwei Zhao and
                  Yunhui Zhu and
                  Xin Sun and
                  Yunxia Guo},
  title        = {Research on deep RIE-based through-Si-via micromachining for 3-D system-in-package
                  integration},
  booktitle    = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
  pages        = {90--93},
  publisher    = {{IEEE} Computer Society},
  year         = {2009},
  url          = {https://doi.org/10.1109/NEMS.2009.5068533},
  doi          = {10.1109/NEMS.2009.5068533},
  timestamp    = {Thu, 23 Mar 2023 23:58:03 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/MiaoJLZZSG09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}