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BibTeX record conf/nems/LiLLSC15
@inproceedings{DBLP:conf/nems/LiLLSC15, author = {Pengcheng Li and Xiaoying Li and Enfu Li and Qiang Shen and Honglong Chang}, title = {Design and fabrication of an in-plane {SOI} {MEMS} accelerometer with a high yield rate}, booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015}, pages = {511--514}, publisher = {{IEEE}}, year = {2015}, url = {https://doi.org/10.1109/NEMS.2015.7147480}, doi = {10.1109/NEMS.2015.7147480}, timestamp = {Wed, 16 Oct 2019 14:14:49 +0200}, biburl = {https://dblp.org/rec/conf/nems/LiLLSC15.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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