BibTeX record conf/essderc/MoyneSP14

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@inproceedings{DBLP:conf/essderc/MoyneSP14,
  author       = {James R. Moyne and
                  Martin Schellenberger and
                  Lothar Pfitzner},
  title        = {The Factory Integration Roadmap in Semiconductor manufacturing},
  booktitle    = {44th European Solid State Device Research Conference, {ESSDERC} 2014,
                  Venice Lido, Italy, September 22-26, 2014},
  pages        = {154--156},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/ESSDERC.2014.6948781},
  doi          = {10.1109/ESSDERC.2014.6948781},
  timestamp    = {Mon, 26 Jun 2023 20:48:39 +0200},
  biburl       = {https://dblp.org/rec/conf/essderc/MoyneSP14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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