BibTeX record conf/essderc/MaxHSM18

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@inproceedings{DBLP:conf/essderc/MaxHSM18,
  author       = {Benjamin Max and
                  Michael Hoffmann and
                  Stefan Slesazeck and
                  Thomas Mikolajick},
  title        = {Ferroelectric Tunnel Junctions based on Ferroelectric-Dielectric Hf0.5Zr0.5.O2/
                  A12O3Capacitor Stacks},
  booktitle    = {48th European Solid-State Device Research Conference, {ESSDERC} 2018,
                  Dresden, Germany, September 3-6, 2018},
  pages        = {142--145},
  publisher    = {{IEEE}},
  year         = {2018},
  url          = {https://doi.org/10.1109/ESSDERC.2018.8486882},
  doi          = {10.1109/ESSDERC.2018.8486882},
  timestamp    = {Thu, 14 Oct 2021 10:04:34 +0200},
  biburl       = {https://dblp.org/rec/conf/essderc/MaxHSM18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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