BibTeX record conf/esm/HeitzingerS02

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@inproceedings{DBLP:conf/esm/HeitzingerS02,
  author       = {Clemens Heitzinger and
                  Siegfried Selberherr},
  editor       = {Krzysztof Amborski and
                  Hermann Meuth},
  title        = {On the Topography Simulation of Memory Cell Trenches for Semiconductor
                  Manufacturing Deposition Processes using the Level Set Method},
  booktitle    = {16\({}^{\mbox{th}}\) European Simulation Multiconference: Modelling
                  and Simulation 2002, June 3-5, 2002, Fachhochschule Darmstadt, Darmstadt,
                  Germany},
  pages        = {653--660},
  publisher    = {{SCS} Europe},
  year         = {2002},
  timestamp    = {Tue, 05 Nov 2002 10:53:44 +0100},
  biburl       = {https://dblp.org/rec/conf/esm/HeitzingerS02.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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