BibTeX record conf/case/ChenHB09

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@inproceedings{DBLP:conf/case/ChenHB09,
  author       = {Argon Chen and
                  Sean Hsueh and
                  Jakey Blue},
  title        = {Optimum sampling for track {PEB} {CD} Integrated Metrology},
  booktitle    = {{IEEE} Conference on Automation Science and Engineering, {CASE} 2009,
                  Bangalore, India, 22-25 August, 2011},
  pages        = {439--442},
  publisher    = {{IEEE}},
  year         = {2009},
  url          = {https://doi.org/10.1109/COASE.2009.5234083},
  doi          = {10.1109/COASE.2009.5234083},
  timestamp    = {Wed, 16 Oct 2019 14:14:53 +0200},
  biburl       = {https://dblp.org/rec/conf/case/ChenHB09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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