BibTeX record conf/3dic/NeveDNLVPBB16

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@inproceedings{DBLP:conf/3dic/NeveDNLVPBB16,
  author       = {C. Roda Neve and
                  Mikael Detalle and
                  Philip Nolmans and
                  Yunlong Li and
                  Joeri De Vos and
                  Geert Van der Plas and
                  Gerald Beyer and
                  Eric Beyne},
  title        = {High-density and low-leakage novel embedded 3D {MIM} capacitor on
                  Si interposer},
  booktitle    = {2016 {IEEE} International 3D Systems Integration Conference, 3DIC
                  2016, San Francisco, CA, USA, November 8-11, 2016},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/3DIC.2016.7970024},
  doi          = {10.1109/3DIC.2016.7970024},
  timestamp    = {Thu, 14 Oct 2021 09:53:40 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/NeveDNLVPBB16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}