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Biqing Zhou

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2024
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Biyun Ling, Minli Cai, Biqing Zhou, Xiaoyue Wang, Yuhu Xia, Yuwei Han, Yaming Wu:
Modeling and Optimization of Multi-terraced-Plate Electrostatic Actuator. IEEE SENSORS 2024: 1-4
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Yuhu Xia, Biyun Ling, Bo Chen, Xiaoyue Wang, Biqing Zhou, Yaming Wu:
Influence of Scallops in Deep Reactive Ion Etching on Vertical Comb-Based Sensors/Actuators. IEEE SENSORS 2024: 1-4

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