Performance of a novel non-planar diaphragm for high-sensitivity structures.

Wed, 01 Jan 2003 00:00:00 +0100

W. J. Wang, R. M. Lin, Y. Ren, X. X. Li:
Performance of a novel non-planar diaphragm for high-sensitivity structures. Microelectron. J. 34(9): 791-796 (2003)