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Carlo G. Pantano

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2009
[j1]
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Raúl José Martín-Palma, Carlo G. Pantano, Akhlesh Lakhtakia:
Towards the use of the conformal-evaporated-film-by-rotation technique in fabricating microelectronic circuits and microsystems. Microelectron. Reliab. 49(4): 460-462 (2009)

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