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Anthony Yen

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affiliation: ASML US, San Jose, CA, USA

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1991
[b1]
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Anthony Yen:
Fabrication of large-area 100 nm-period gratings using achromatic holographic lithography. Massachusetts Institute of Technology, Cambridge, MA, USA, 1991

Conference and Workshop Papers

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2022
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Martin van den Brink, Anthony Yen, Paul van Wijnen, Michael Lercel, Boudewijn Sluijk:
Holistic Patterning to Advance Semiconductor Manufacturing in the 2020s and Beyond. VLSI Technology and Circuits 2022: 3-7

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