Fabrication of high performance AlGaN/GaN FinFET by utilizing anisotropic wet etching in TMAH solution.

Thu, 01 Jan 2015 00:00:00 +0100

Dong-Hyeok Son, Young-woo Jo, Ryun-Hwi Kim, Chan Heo, Jae Hwa Seo, Jin Su Kim, In Man Kang, Sorin Cristoloveanu, Jung-Hee Lee:
Fabrication of high performance AlGaN/GaN FinFET by utilizing anisotropic wet etching in TMAH solution. ESSDERC 2015: 130-133