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Erdal Bulgan

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2000 – 2009

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2009
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Kazunori Takahashi, Erdal Bulgan, Yoshiaki Kanamori, Kazuhiro Hane:
Submicrometer Comb-Drive Actuators Fabricated on Thin Single Crystalline Silicon Layer. IEEE Trans. Ind. Electron. 56(4): 991-995 (2009)

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