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E. Sleeckx

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2005
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E. Sleeckx, Marc Schaekers, X. Shi, E. Kunnen, B. Degroote, M. Jurczak, Muriel de Potter de ten Broeck, E. Augendre:
Optimization of low temperature silicon nitride processes for improvement of device performance. Microelectron. Reliab. 45(5-6): 865-868 (2005)

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