Stephen Burgess

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

◀ ▶ joint publications with Kathrine Giles

> Home > Persons > Stephen Burgess

Publications

2009
[c11]
- view
  authority control:
- export record
  dblp key:
  - conf/3dic/BuchananBGMZ09
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/3dic/BuchananBGMZ09
Keith Buchanan, Stephen Burgess, Kathrine Giles, Matthew Muggeridge, Hao Zhao:
Etch, dielectrics and metal barrier-seed for low temperature through-silicon via processing. 3DIC 2009: 1-4

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.