Rakesh Kumar

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

◀ ▶ joint publications with Sohan Singh Mehta

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Publications

2004
[j5]
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Sohan Singh Mehta, Sun Hai Qin, Moitreyee Mukherjee-Roy, Navab Singh, Rakesh Kumar:
Resist pattern peeling assessment in DUV chemically amplified resist. Microelectron. J. 35(5): 427-429 (2004)
[j4]
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  persistent URL:
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Sohan Singh Mehta, Navab Singh, Moitreyee Mukherjee-Roy, Rakesh Kumar:
Placement of scattering bars in binary and attenuated phase shift mask for damascene trench patterning. Microelectron. J. 35(7): 621-626 (2004)

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