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BibTeX records: I. Genchev
@article{DBLP:journals/mr/StadlerGBDPHBE01, author = {A. Stadler and I. Genchev and A. Bergmaier and G. Dollinger and Vesselinka Petrova{-}Koch and Walter Hansch and H. Baumg{\"{a}}rtner and I. Eisele}, title = {Nitrogen implantations for rapid thermal oxinitride layers}, journal = {Microelectron. Reliab.}, volume = {41}, number = {7}, pages = {977--980}, year = {2001}, url = {https://doi.org/10.1016/S0026-2714(01)00051-8}, doi = {10.1016/S0026-2714(01)00051-8}, timestamp = {Mon, 18 Sep 2023 01:00:00 +0200}, biburl = {https://dblp.org/rec/journals/mr/StadlerGBDPHBE01.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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