Shinya Ito (Selection)

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Shinya Ito, Hiroaki Namba, Tsuyoshi Hirata, Koichi Ando, Shin Koyama, Nobuyuki Ikezawa, Tatsuya Suzuki, Takehiro Saitoh, Tadahiko Horiuchi: Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance. Microelectronics Reliability 42(2): 201-209 (2002)

Selection of 1 from 6 records - Shinya Ito has 18 coauthors