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| 4 |       | Xiqiu Fan, Honghai Zhang, Sheng Liu, Xiaofeng Hu, Ke Jia: NIL - a low-cost and high-throughput MEMS fabrication method compatible with IC manufacturing technology. Microelectronics Journal 37(2): 121-126 (2006) |
Selection of 1 from 8 records - Xiaofeng Hu has 18 coauthors
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