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Olivier Français (Selection)

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1Electronic Edition pubzone.org CiteSeerX Google scholar BibTeX bibliographical record in XMLF. Marty, L. Rousseau, B. Saadany, B. Mercier, Olivier Français, Y. Mita, T. Bourouina: Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures. Microelectronics Journal 36(7): 673-677 (2005)

Selection of 1 from 5 records - Olivier Français has 32 coauthors

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