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| 5 | Matthias Mohaupt, Erik Beckert, Thomas Burkhardt, Marcel Hornaff, Christoph Damm, Ramona Eberhardt, Andreas Tünnermann, Hans-Joachim Döring, Klaus Reimer: Precisely Assembled Multi Deflection Arrays - Key Components for Multi Shaped Beam Lithography. IPAS 2012: 42-50 |
Selection of 1 from 5 records - Thomas Burkhardt has 10 coauthors
Last update 2012-09-10 CET by the DBLP Team —
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