BibTeX record journals/tim/XuLSLYCZHC24

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@article{DBLP:journals/tim/XuLSLYCZHC24,
  author       = {Peng Xu and
                  Rui{-}Jun Li and
                  Yi Shen and
                  Rong{-}Wei Lin and
                  Pan Yao and
                  Zhenying Cheng and
                  Liansheng Zhang and
                  Qiang{-}Xian Huang and
                  Fang Cheng},
  title        = {Nano Precision Noncontact Probing System Using Tungsten Ball Tip for
                  High Aspect Ratio Structures With Horizontal Internal Dimensions Below
                  100 {\(\mu\)}m},
  journal      = {{IEEE} Trans. Instrum. Meas.},
  volume       = {73},
  pages        = {1--10},
  year         = {2024},
  url          = {https://doi.org/10.1109/TIM.2023.3343805},
  doi          = {10.1109/TIM.2023.3343805},
  timestamp    = {Fri, 26 Jan 2024 07:55:44 +0100},
  biburl       = {https://dblp.org/rec/journals/tim/XuLSLYCZHC24.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}