BibTeX record journals/tim/QuWYBL23

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@article{DBLP:journals/tim/QuWYBL23,
  author       = {Zilian Qu and
                  Wensong Wang and
                  Zhengchun Yang and
                  Qiwen Bao and
                  Xueli Li},
  title        = {High-Precision Resistivity Measurement of Silicon Wafer Under Unstable
                  Lift-Off Distance Using Inductive and Laser Sensors-Integrated Probe},
  journal      = {{IEEE} Trans. Instrum. Meas.},
  volume       = {72},
  pages        = {1--8},
  year         = {2023},
  url          = {https://doi.org/10.1109/TIM.2023.3323998},
  doi          = {10.1109/TIM.2023.3323998},
  timestamp    = {Thu, 09 Nov 2023 21:13:11 +0100},
  biburl       = {https://dblp.org/rec/journals/tim/QuWYBL23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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