BibTeX record journals/tim/QuWLLZ21

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@article{DBLP:journals/tim/QuWLLZ21,
  author       = {Zilian Qu and
                  Wensong Wang and
                  Xueli Li and
                  Qi Li and
                  Yuanjin Zheng},
  title        = {Measurement and Error Analysis of Cu Film Thickness With Ta Barrier
                  Layer on Wafer for {CMP} Application},
  journal      = {{IEEE} Trans. Instrum. Meas.},
  volume       = {70},
  pages        = {1--10},
  year         = {2021},
  url          = {https://doi.org/10.1109/TIM.2020.3017057},
  doi          = {10.1109/TIM.2020.3017057},
  timestamp    = {Thu, 17 Dec 2020 18:28:57 +0100},
  biburl       = {https://dblp.org/rec/journals/tim/QuWLLZ21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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