BibTeX record journals/tim/JacobsSB21

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@article{DBLP:journals/tim/JacobsSB21,
  author       = {Kristof J. P. Jacobs and
                  Michele Stucchi and
                  Eric Beyne},
  title        = {Localization of Electrical Defects in Hybrid Bonding Interconnect
                  Structures by Scanning Photocapacitance Microscopy},
  journal      = {{IEEE} Trans. Instrum. Meas.},
  volume       = {70},
  pages        = {1--7},
  year         = {2021},
  url          = {https://doi.org/10.1109/TIM.2021.3108531},
  doi          = {10.1109/TIM.2021.3108531},
  timestamp    = {Thu, 16 Sep 2021 18:02:37 +0200},
  biburl       = {https://dblp.org/rec/journals/tim/JacobsSB21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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