BibTeX record journals/tim/GaoRLQMXM23

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@article{DBLP:journals/tim/GaoRLQMXM23,
  author       = {Haoyu Gao and
                  Hanwen Ren and
                  Qingmin Li and
                  Tianrun Qi and
                  Yiqun Ma and
                  Tao Xiao and
                  Yidan Ma},
  title        = {Measurement Sensitivity and Reliability Analysis of the Space Charge
                  Ellipsometry Detection System},
  journal      = {{IEEE} Trans. Instrum. Meas.},
  volume       = {72},
  pages        = {1--13},
  year         = {2023},
  url          = {https://doi.org/10.1109/TIM.2023.3325871},
  doi          = {10.1109/TIM.2023.3325871},
  timestamp    = {Thu, 09 Nov 2023 21:13:11 +0100},
  biburl       = {https://dblp.org/rec/journals/tim/GaoRLQMXM23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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