BibTeX record journals/tie/KimY16

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@article{DBLP:journals/tie/KimY16,
  author       = {In Joong Kim and
                  Ilgu Yun},
  title        = {Plasma Process Uniformity Diagnosis Technique Using Optical Emission
                  Spectroscopy With Spatially Resolved Ring Lens},
  journal      = {{IEEE} Trans. Ind. Electron.},
  volume       = {63},
  number       = {9},
  pages        = {5674--5681},
  year         = {2016},
  url          = {https://doi.org/10.1109/TIE.2016.2571261},
  doi          = {10.1109/TIE.2016.2571261},
  timestamp    = {Fri, 22 May 2020 15:36:36 +0200},
  biburl       = {https://dblp.org/rec/journals/tie/KimY16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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