DBLP Record 'journals/tcad/ZhouHLL07'

BibTeX

@article{DBLP:journals/tcad/ZhouHLL07,
  author    = {Zai-Fa Zhou and
               Qing-An Huang and
               Wei-Hua Li and
               Wei Lu},
  title     = {A Novel 3-D Dynamic Cellular Automata Model for Photoresist-Etching
               Process Simulation},
  journal   = {IEEE Trans. on CAD of Integrated Circuits and Systems},
  volume    = {26},
  number    = {1},
  year      = {2007},
  pages     = {100-114},
  ee        = {http://dx.doi.org/10.1109/TCAD.2006.882510},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}