BibTeX record journals/tcad/YaoZHLXZXL23

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@article{DBLP:journals/tcad/YaoZHLXZXL23,
  author       = {Wenze Yao and
                  Haojie Zhao and
                  Chengyang Hou and
                  Wei Liu and
                  Hongcheng Xu and
                  Xin Zhang and
                  Jing Xiao and
                  Jie Liu},
  title        = {Efficient Proximity Effect Correction Using Fast Multipole Method
                  With Unequally Spaced Grid for Electron Beam Lithography},
  journal      = {{IEEE} Trans. Comput. Aided Des. Integr. Circuits Syst.},
  volume       = {42},
  number       = {1},
  pages        = {218--228},
  year         = {2023},
  url          = {https://doi.org/10.1109/TCAD.2022.3171441},
  doi          = {10.1109/TCAD.2022.3171441},
  timestamp    = {Sun, 15 Jan 2023 18:31:32 +0100},
  biburl       = {https://dblp.org/rec/journals/tcad/YaoZHLXZXL23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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