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BibTeX record journals/tcad/TohNS94
@article{DBLP:journals/tcad/TohNS94, author = {Kenny K. H. Toh and Andrew R. Neureuther and Edward W. Scheckler}, title = {Algorithms for simulation of three-dimensional etching}, journal = {{IEEE} Trans. Comput. Aided Des. Integr. Circuits Syst.}, volume = {13}, number = {5}, pages = {616--624}, year = {1994}, url = {https://doi.org/10.1109/43.277635}, doi = {10.1109/43.277635}, timestamp = {Thu, 24 Sep 2020 11:26:50 +0200}, biburl = {https://dblp.org/rec/journals/tcad/TohNS94.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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