DBLP Record 'journals/tcad/TianTW02'

BibTeX

@article{DBLP:journals/tcad/TianTW02,
  author    = {Ruiqi Tian and
               Xiaoping Tang and
               Martin D. F. Wong},
  title     = {Dummy-feature placement for chemical-mechanical polishinguniformity
               in a shallow-trench isolation process},
  journal   = {IEEE Trans. on CAD of Integrated Circuits and Systems},
  volume    = {21},
  number    = {1},
  year      = {2002},
  pages     = {63-71},
  ee        = {http://doi.ieeecomputersociety.org/10.1109/43.974138},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}