BibTeX record journals/tcad/SchecklerTPN93

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@article{DBLP:journals/tcad/SchecklerTPN93,
  author       = {Edward W. Scheckler and
                  Nelson N. Tam and
                  Anton K. Pfau and
                  Andrew R. Neureuther},
  title        = {An efficient volume-removal algorithm for practical three-dimensional
                  lithography simulation with experimental verification},
  journal      = {{IEEE} Trans. Comput. Aided Des. Integr. Circuits Syst.},
  volume       = {12},
  number       = {9},
  pages        = {1345--1356},
  year         = {1993},
  url          = {https://doi.org/10.1109/43.240082},
  doi          = {10.1109/43.240082},
  timestamp    = {Thu, 24 Sep 2020 11:28:55 +0200},
  biburl       = {https://dblp.org/rec/journals/tcad/SchecklerTPN93.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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