BibTeX record journals/tcad/PykaFHS99

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@article{DBLP:journals/tcad/PykaFHS99,
  author       = {Wolfgang Pyka and
                  Peter Fleischmann and
                  Bernhard Haindl and
                  Siegfried Selberherr},
  title        = {Three-dimensional simulation of HPCVD-linking continuum transport
                  and reaction kinetics with topography simulation},
  journal      = {{IEEE} Trans. Comput. Aided Des. Integr. Circuits Syst.},
  volume       = {18},
  number       = {12},
  pages        = {1741--1749},
  year         = {1999},
  url          = {https://doi.org/10.1109/43.811323},
  doi          = {10.1109/43.811323},
  timestamp    = {Sat, 09 Apr 2022 12:32:26 +0200},
  biburl       = {https://dblp.org/rec/journals/tcad/PykaFHS99.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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