BibTeX record: journals/tcad/PelkaMM88

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@article{DBLP:journals/tcad/PelkaMM88,
  author    = {Joachim Pelka and
               K. P. Muller and
               Hermann Mader},
  title     = {Simulation of dry etch processes by {COMPOSITE}},
  journal   = {{IEEE} Trans. on {CAD} of Integrated Circuits and Systems},
  year      = {1988},
  volume    = {7},
  number    = {2},
  pages     = {154--159},
  url       = {http://doi.ieeecomputersociety.org/10.1109/43.3144},
  doi       = {10.1109/43.3144},
  timestamp = {Wed, 22 Oct 2014 00:13:37 +0200},
  biburl    = {http://dblp.uni-trier.de/rec/bib/journals/tcad/PelkaMM88},
  bibsource = {dblp computer science bibliography, http://dblp.org}
}