DBLP BibTeX Record 'journals/tcad/PelkaMM88'

@article{DBLP:journals/tcad/PelkaMM88,
  author    = {Joachim Pelka and
               K. P. Muller and
               Hermann Mader},
  title     = {Simulation of dry etch processes by COMPOSITE},
  journal   = {IEEE Trans. on CAD of Integrated Circuits and Systems},
  volume    = {7},
  number    = {2},
  year      = {1988},
  pages     = {154-159},
  ee        = {http://doi.ieeecomputersociety.org/10.1109/43.3144},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}