Kenji Nishi Kouichi Sakamoto Shigeki Kuroda Jun Ueda Tatsurou Miyoshi Shintaro Ushio A general-purpose two-dimensional process simulator-OPUS for arbitrary structures. 23-32 1989 8 IEEE Trans. on CAD of Integrated Circuits and Systems 1 http://doi.ieeecomputersociety.org/10.1109/43.21815 db/journals/tcad/tcad8.html#NishiSKUMU89