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BibTeX record journals/tcad/MatsuzawaMHS87
@article{DBLP:journals/tcad/MatsuzawaMHS87, author = {Teruo Matsuzawa and Akemi Moniwa and N. Hasegawa and Hideo Sunami}, title = {Two-Dimensional Simulation of Photolithography on Reflective Stepped Substrate}, journal = {{IEEE} Trans. Comput. Aided Des. Integr. Circuits Syst.}, volume = {6}, number = {3}, pages = {446--451}, year = {1987}, url = {https://doi.org/10.1109/TCAD.1987.1270291}, doi = {10.1109/TCAD.1987.1270291}, timestamp = {Thu, 24 Sep 2020 11:27:11 +0200}, biburl = {https://dblp.org/rec/journals/tcad/MatsuzawaMHS87.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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