BibTeX record journals/tcad/HiraiSETM87

download as .bib file

@article{DBLP:journals/tcad/HiraiSETM87,
  author       = {Yoshihiko Hirai and
                  Masaru Sasago and
                  Masayuki Endo and
                  Kiichiro Tsuji and
                  Yojiro Mano},
  title        = {Process Modeling for Photoresist Development and Design of DLR/sd
                  (Double-Layer Resist by a Single Development) Process},
  journal      = {{IEEE} Trans. Comput. Aided Des. Integr. Circuits Syst.},
  volume       = {6},
  number       = {3},
  pages        = {403--409},
  year         = {1987},
  url          = {https://doi.org/10.1109/TCAD.1987.1270285},
  doi          = {10.1109/TCAD.1987.1270285},
  timestamp    = {Thu, 24 Sep 2020 11:28:18 +0200},
  biburl       = {https://dblp.org/rec/journals/tcad/HiraiSETM87.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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