HarafujiMNKY93'

@article{DBLP:journals/tcad/HarafujiMNKY93,
  author    = {Kenji Harafuji and
               Akio Misaka and
               Noboru Nomura and
               Masahiro Kawamoto and
               Hirohiko Yamashita},
  title     = {A novel hierarchical approach for proximity effect correction
               in electron beam lithography},
  journal   = {IEEE Trans. on CAD of Integrated Circuits and Systems},
  volume    = {12},
  number    = {10},
  year      = {1993},
  pages     = {1508-1514},
  ee        = {http://doi.ieeecomputersociety.org/10.1109/43.256925},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}