BibTeX record journals/tcad/GuerrieriN88

download as .bib file

@article{DBLP:journals/tcad/GuerrieriN88,
  author       = {Roberto Guerrieri and
                  Andrew R. Neureuther},
  title        = {Simulation of microcrack effects in dissolution of positive resist
                  exposed by X-ray lithography},
  journal      = {{IEEE} Trans. Comput. Aided Des. Integr. Circuits Syst.},
  volume       = {7},
  number       = {7},
  pages        = {755--764},
  year         = {1988},
  url          = {https://doi.org/10.1109/43.3946},
  doi          = {10.1109/43.3946},
  timestamp    = {Thu, 24 Sep 2020 11:27:36 +0200},
  biburl       = {https://dblp.org/rec/journals/tcad/GuerrieriN88.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
a service of  Schloss Dagstuhl - Leibniz Center for Informatics

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.