Nikos Glezos Ioannis Raptis A fast electron beam lithography simulator based on the Boltzmann transport equation. 92-102 1996 15 IEEE Trans. on CAD of Integrated Circuits and Systems 1 http://doi.ieeecomputersociety.org/10.1109/43.486275 db/journals/tcad/tcad15.html#GlezosR96