DBLP Record 'journals/tcad/GlezosR96'

BibTeX

@article{DBLP:journals/tcad/GlezosR96,
  author    = {Nikos Glezos and
               Ioannis Raptis},
  title     = {A fast electron beam lithography simulator based on the
               Boltzmann transport equation},
  journal   = {IEEE Trans. on CAD of Integrated Circuits and Systems},
  volume    = {15},
  number    = {1},
  year      = {1996},
  pages     = {92-102},
  ee        = {http://doi.ieeecomputersociety.org/10.1109/43.486275},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}