Sanae Fukuda Naoyuki Shigyo Koichi Kato Shin Nakamura A ULSI 2-D capacitance simulator for complex structures based on actual processes. 39-47 1990 9 IEEE Trans. on CAD of Integrated Circuits and Systems 1 http://doi.ieeecomputersociety.org/10.1109/43.45855 db/journals/tcad/tcad9.html#FukudaSKN90