BibTeX record journals/tcad/ChuM15

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@article{DBLP:journals/tcad/ChuM15,
  author       = {Chris C. N. Chu and
                  Wai{-}Kei Mak},
  title        = {Flexible Packed Stencil Design With Multiple Shaping Apertures and
                  Overlapping Shots for E-beam Lithography},
  journal      = {{IEEE} Trans. Comput. Aided Des. Integr. Circuits Syst.},
  volume       = {34},
  number       = {10},
  pages        = {1652--1663},
  year         = {2015},
  url          = {https://doi.org/10.1109/TCAD.2015.2427256},
  doi          = {10.1109/TCAD.2015.2427256},
  timestamp    = {Thu, 24 Sep 2020 11:27:59 +0200},
  biburl       = {https://dblp.org/rec/journals/tcad/ChuM15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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